Atsushi Umekawa

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,065,741
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 12,050,138
- Issue date Jul 30, 2024
- Kokusai Electric Corporation
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,365,482
- Issue date Jun 21, 2022
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 11,300,456
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Heating part, substrate processing apparatus, and method of manufac...
- Patent number 11,198,935
- Issue date Dec 14, 2021
- Kokusai Electric Corporation
- Shinobu Sugiura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and manufacturing method of semicond...
- Patent number 10,998,205
- Issue date May 4, 2021
- Kokusai Electric Corporation
- Tomoyasu Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,684,174
- Issue date Jun 16, 2020
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 10,640,872
- Issue date May 5, 2020
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,228,291
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,646,862
- Issue date May 9, 2017
- Hitachi Kokusai Electric, Inc.
- Katsuyoshi Hamano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 9,171,724
- Issue date Oct 27, 2015
- HITACHI KOKUSAIELECTRIC INC.
- Shinji Yashima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus having rotatable slot-type antenna a...
- Patent number 8,987,645
- Issue date Mar 24, 2015
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,557,720
- Issue date Oct 15, 2013
- Hitachi Kokusai Electric, Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,486,222
- Issue date Jul 16, 2013
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240222086
- Publication date Jul 4, 2024
- Kokusai Electric Corporation
- Kazuyuki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20220275515
- Publication date Sep 1, 2022
- Kokusai Electric Corporation
- Mikio OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20220082447
- Publication date Mar 17, 2022
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20200232097
- Publication date Jul 23, 2020
- Kokusai Electric Corporation
- Mikio OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20200166413
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICOND...
- Publication number 20200090965
- Publication date Mar 19, 2020
- Kokusai Electric Corporation
- Tomoyasu MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20190106787
- Publication date Apr 11, 2019
- Kokusai Electric Corporation
- Mikio OHNO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20180328790
- Publication date Nov 15, 2018
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULA...
- Publication number 20180040488
- Publication date Feb 8, 2018
- Hitachi Kokusai Electric Inc.
- Toshiki FUJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20170107620
- Publication date Apr 20, 2017
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20160245704
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20160093476
- Publication date Mar 31, 2016
- Hitachi Kokusai Electric Inc.
- Kazuyuki TOYODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20160002789
- Publication date Jan 7, 2016
- Hitachi Kokusai Electric Inc.
- Tadashi KONTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150147894
- Publication date May 28, 2015
- Hitachi Kokusai Electric Inc.
- Katsuyoshi HAMANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20130072034
- Publication date Mar 21, 2013
- Hitachi Kokusai Electric Inc.
- Shinji YASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120129358
- Publication date May 24, 2012
- Hitachi Kokusai Electric Inc.
- Unryu OGAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108080
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108061
- Publication date May 3, 2012
- Hitachi Kokusai Electric, Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110233198
- Publication date Sep 29, 2011
- Hitachi Kokusai Electric Inc.
- Masahisa OKUNO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Atsushi Umekawa

Person

Patents Grantslast 30 patents

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, recording medium, and fluid circula...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, and thermocouple

Heating part, substrate processing apparatus, and method of manufac...

Substrate processing apparatus and manufacturing method of semicond...

Substrate processing apparatus, and thermocouple

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and method for manufacturing semicon...

Substrate processing apparatus having rotatable slot-type antenna a...

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing apparatus and method of manufacturing a semico...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULA...

HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFAC...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD