Atsushi Umemura

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,523,926
- Issue date Dec 20, 2016
- Canon Kabushiki Kaisha
- Atsushi Umemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exhaust apparatus, processing apparatus, and device manufacturing m...
- Patent number 8,497,974
- Issue date Jul 30, 2013
- Canon Kabushiki Kaisha
- Atsushi Umemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXHAUST APPARATUS, PROCESSING APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20130280659
- Publication date Oct 24, 2013
- Atsushi Umemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130021594
- Publication date Jan 24, 2013
- Canon Kabushiki Kaisha
- Atsushi Umemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXHAUST APPARATUS, PROCESSING APPARATUS, AND DEVICE MANUFACTURING M...
- Publication number 20100167216
- Publication date Jul 1, 2010
- Canon Kabushiki Kaisha
- Atsushi Umemura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY