Atsushi UTO

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,264,248
- Issue date Mar 1, 2022
- Tokyo Electron Limited
- Yoshimitsu Kon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20200273712
- Publication date Aug 27, 2020
- TOKYO ELECTRON LIMITED
- Atsushi UTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200185229
- Publication date Jun 11, 2020
- TOKYO ELECTRON LIMITED
- Yoshimitsu KON
- H01 - BASIC ELECTRIC ELEMENTS