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Patents Grants
last 30 patents
Information
Patent Grant
Large-size synthetic quartz glass substrate, evaluation method, and...
Patent number
11,591,260
Issue date
Feb 28, 2023
Shin-Etsu Chemical Co., Ltd.
Yoko Ishitsuka
B24 - GRINDING POLISHING
Information
Patent Grant
Method for producing synthetic quartz glass substrate
Patent number
11,465,260
Issue date
Oct 11, 2022
Shin-Etsu Chemical Co., Ltd.
Yoko Ishitsuka
B24 - GRINDING POLISHING
Information
Patent Grant
Large-size synthetic quartz glass substrate, evaluation method, and...
Patent number
10,865,139
Issue date
Dec 15, 2020
Shin-Etsu Chemical Co., Ltd.
Yoko Ishitsuka
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Method for preparing synthetic quartz glass substrate
Patent number
10,737,966
Issue date
Aug 11, 2020
Shin-Etsu Chemical Co., Ltd.
Yoko Ishitsuka
G01 - MEASURING TESTING
Information
Patent Grant
Method for producing substrate
Patent number
10,646,976
Issue date
May 12, 2020
Shin-Etsu Chemical Co., Ltd.
Yoko Ishitsuka
B24 - GRINDING POLISHING
Information
Patent Grant
Method of preparing substrate
Patent number
10,065,285
Issue date
Sep 4, 2018
Shin-Etsu Chemical Co., Ltd.
Harunobu Matsui
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing agent for synthetic quartz glass substrate
Patent number
9,919,962
Issue date
Mar 20, 2018
Shin-Etsu Chemical Co., Ltd.
Daijitsu Harada
B24 - GRINDING POLISHING
Information
Patent Grant
Method for producing large-size synthetic quartz glass substrate
Patent number
8,460,061
Issue date
Jun 11, 2013
Shin-Etsu Chemical Co., Ltd.
Yukio Shibano
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Large-sized glass substrate
Patent number
7,745,071
Issue date
Jun 29, 2010
Shin-Etsu Chemical Co., Ltd.
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Grant
Large-size glass substrate for photomask and making method, compute...
Patent number
7,608,542
Issue date
Oct 27, 2009
Shin-Etsu Chemical Co., Ltd.
Shuhei Ueda
G11 - INFORMATION STORAGE
Information
Patent Grant
Large-sized substrate and method of producing the same
Patent number
7,191,618
Issue date
Mar 20, 2007
Shin-Etsu Chemical Co., Ltd.
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Grant
Method for preparing large-size substrate
Patent number
7,183,210
Issue date
Feb 27, 2007
Shin-Etsu Chemical Co., Ltd.
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Grant
Silica glass substrates and their selection
Patent number
6,928,837
Issue date
Aug 16, 2005
Shin-Etsu Chemical Co., Ltd.
Masaki Takeuchi
C03 - GLASS MINERAL OR SLAG WOOL
Patents Applications
last 30 patents
Information
Patent Application
LARGE-SIZE SYNTHETIC QUARTZ GLASS SUBSTRATE, EVALUATION METHOD, AND...
Publication number
20200346974
Publication date
Nov 5, 2020
Shin-Etsu Chemical Co., Ltd.
Yoko ISHITSUKA
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS SUBSTRATE
Publication number
20190366510
Publication date
Dec 5, 2019
Shin-Etsu Chemical Co., Ltd.
Yoko ISHITSUKA
B24 - GRINDING POLISHING
Information
Patent Application
LARGE-SIZE SYNTHETIC QUARTZ GLASS SUBSTRATE, EVALUATION METHOD, AND...
Publication number
20180319705
Publication date
Nov 8, 2018
Shin-Etsu Chemical Co., Ltd.
Yoko ISHITSUKA
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
METHOD FOR PRODUCING SUBSTRATE
Publication number
20180056475
Publication date
Mar 1, 2018
Shin-Etsu Chemical Co., Ltd.
Yoko ISHITSUKA
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR PREPARING SYNTHETIC QUARTZ GLASS SUBSTRATE
Publication number
20170260081
Publication date
Sep 14, 2017
Shin-Etsu Chemical Co., Ltd.
Yoko ISHITSUKA
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
POLISHING AGENT FOR SYNTHETIC QUARTZ GLASS SUBSTRATE
Publication number
20150021292
Publication date
Jan 22, 2015
Shin-Etsu Chemical Co., Ltd.
Daijitsu HARADA
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METHOD OF PREPARING SUBSTRATE
Publication number
20130122785
Publication date
May 16, 2013
Shin-Etsu Chemical Co., Ltd.
Harunobu Matsui
B24 - GRINDING POLISHING
Information
Patent Application
METHOD FOR PRODUCING LARGE-SIZE SYNTHETIC QUARTZ GLASS SUBSTRATE
Publication number
20100255761
Publication date
Oct 7, 2010
Yukio SHIBANO
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
POLISHING AGENT FOR SYNTHETIC QUARTZ GLASS SUBSTRATE
Publication number
20100243950
Publication date
Sep 30, 2010
Daijitsu Harada
B24 - GRINDING POLISHING
Information
Patent Application
Large-Size Glass Substrate For Photomask and Making Method, Compute...
Publication number
20080261119
Publication date
Oct 23, 2008
Shuhei Ueda
G11 - INFORMATION STORAGE
Information
Patent Application
LARGE-SIZED SUBSTRATE AND METHOD OF PRODUCING THE SAME
Publication number
20070132068
Publication date
Jun 14, 2007
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Application
Method for preparing large-size substrate
Publication number
20050181611
Publication date
Aug 18, 2005
Shin-Etsu Chemical Co., Ltd.
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Application
Large-sized substrate and method of producing the same
Publication number
20030143403
Publication date
Jul 31, 2003
Yukio Shibano
B24 - GRINDING POLISHING
Information
Patent Application
Silica glass substrates and their selection
Publication number
20020078710
Publication date
Jun 27, 2002
Shin-Etsu Chemical Co., Ltd.
Masaki Takeuchi
C03 - GLASS MINERAL OR SLAG WOOL