Atsushi Yamagami

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 6,558,507
- Issue date May 6, 2003
- Canon Kabushiki Kaisha
- Koji Teranishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD apparatus and plasma processing method
- Patent number 6,435,130
- Issue date Aug 20, 2002
- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method
- Patent number 6,291,029
- Issue date Sep 18, 2001
- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-frequency introducing means, plasma treatment apparatus, and p...
- Patent number 6,152,071
- Issue date Nov 28, 2000
- Canon Kabushiki Kaisha
- Kazuyoshi Akiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and processing method
- Patent number 6,145,469
- Issue date Nov 14, 2000
- Canon Kabushiki Kaisha
- Koji Teranishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 6,076,481
- Issue date Jun 20, 2000
- Canon Kabushiki Kaisha
- Atsushi Yamagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process apparatus and plasma process method
- Patent number 6,065,425
- Issue date May 23, 2000
- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,970,907
- Issue date Oct 26, 1999
- Canon Kabushiki Kaisha
- Satoshi Takai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming high-quality deposited film utilizing plasma CVD
- Patent number 5,846,612
- Issue date Dec 8, 1998
- Canon Kabushiki Kaisha
- Satoshi Takaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,728,278
- Issue date Mar 17, 1998
- Canon Kabushiki Kaisha/Applied Materials Japan Inc.
- Nobuyuki Okamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond crystal forming method
- Patent number 5,607,560
- Issue date Mar 4, 1997
- Canon Kabushiki Kaisha
- Keiji Hirabayashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Plasma CVD process using a very-high-frequency and plasma CVD appar...
- Patent number 5,540,781
- Issue date Jul 30, 1996
- Canon Kabushiki Kaisha
- Atsushi Yamagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD process using a very-high-frequency and plasma CVD appar...
- Patent number 5,534,070
- Issue date Jul 9, 1996
- Canon Kabushiki Kaisha
- Nobuyuki Okamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a functional deposited film by bias sputtering p...
- Patent number 5,510,011
- Issue date Apr 23, 1996
- Canon Kabushiki Kaisha
- Nobuyuki Okamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 5,316,645
- Issue date May 31, 1994
- Canon Kabushiki Kaisha
- Atsushi Yamagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for the formation of a functional deposited film by hydroge...
- Patent number 5,178,905
- Issue date Jan 12, 1993
- Canon Kabushiki Kaisha
- Masahiro Kanai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atsushi Yamagami

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Plasma CVD apparatus and plasma processing method

Plasma processing method

High-frequency introducing means, plasma treatment apparatus, and p...

Plasma processing apparatus and processing method

Plasma processing apparatus and plasma processing method

Plasma process apparatus and plasma process method

Plasma processing apparatus

Process for forming high-quality deposited film utilizing plasma CVD

Plasma processing apparatus

Diamond crystal forming method

Plasma CVD process using a very-high-frequency and plasma CVD appar...

Plasma CVD process using a very-high-frequency and plasma CVD appar...

Method for forming a functional deposited film by bias sputtering p...

Plasma processing apparatus

Process for the formation of a functional deposited film by hydroge...