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Atsushi Yamaguchi
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Chigasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
6,710,850
Issue date
Mar 23, 2004
Nikon Corporation
Atsushi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
Patent number
6,272,763
Issue date
Aug 14, 2001
Nikon Corporation
Atsushi Yamaguchi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Staging apparatus and method, and method for manufacturing the stag...
Patent number
5,983,513
Issue date
Nov 16, 1999
Nikon Corporation
Atsushi Yamaguchi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Staging apparatus
Patent number
5,832,620
Issue date
Nov 10, 1998
Nikon Corporation
Atsushi Yamaguchi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Staging apparatus
Patent number
5,502,899
Issue date
Apr 2, 1996
Nikon Corporation
Atsushi Yamaguchi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Device for positioning circular semiconductor wafers
Patent number
5,194,743
Issue date
Mar 16, 1993
Nikon Corporation
Masaaki Aoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Step-and-repeat exposure method
Patent number
4,792,693
Issue date
Dec 20, 1988
Nikon Corporation
Atsushi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Exposure apparatus, exposure method, position control method, and m...
Publication number
20070058146
Publication date
Mar 15, 2007
Nikon Corporation
Atsushi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Linear motor force ripple identification and compensation with iter...
Publication number
20060170382
Publication date
Aug 3, 2006
Nikon Corporation
Pai-Hsueh Yang
G05 - CONTROLLING REGULATING
Information
Patent Application
Feedforward control with reduced learning time for lithographic sys...
Publication number
20050231706
Publication date
Oct 20, 2005
Nikon Corporation
Pai-Hsueh Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure apparatus and exposure method
Publication number
20020109824
Publication date
Aug 15, 2002
Nikon Corporation
Atsushi Yamaguchi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY