Atsuyasu MIURA

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical liquid preparation device, and substrate processing device
- Patent number 12,064,739
- Issue date Aug 20, 2024
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,521,865
- Issue date Dec 6, 2022
- SCREEN Holdings Co., Ltd.
- Hiroki Tsujikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation method, chemical liquid preparation dev...
- Patent number 11,439,967
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,854,481
- Issue date Dec 1, 2020
- SCREEN Holdings Co., Ltd.
- Shigeki Tanizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,786,836
- Issue date Sep 29, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and processing cup cleaning method
- Patent number 10,658,203
- Issue date May 19, 2020
- SCREEN Holdings Co., Ltd.
- Hiroki Tsujikawa
- B08 - CLEANING
Information Patent Grant
Recovery piping cleaning method and substrate processing apparatus
- Patent number 10,639,683
- Issue date May 5, 2020
- SCREEN Holdings Co., Ltd.
- Yuya Tsuchihashi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and nozzle cleaning method
- Patent number 10,622,225
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,199,243
- Issue date Feb 5, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical liquid preparation method of preparing a chemical liquid f...
- Patent number 10,186,435
- Issue date Jan 22, 2019
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing method
- Patent number 9,956,594
- Issue date May 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,687,887
- Issue date Jun 27, 2017
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Grant
Substrate treatment apparatus and substrate treatment method
- Patent number 9,050,616
- Issue date Jun 9, 2015
- SCREEN Holdings Co., Ltd.
- Atsuyasu Miura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20240342672
- Publication date Oct 17, 2024
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220347641
- Publication date Nov 3, 2022
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20200144081
- Publication date May 7, 2020
- SCREEN Holdings Co., Ltd.
- Hiroki TSUJIKAWA
- B08 - CLEANING
Information Patent Application
CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...
- Publication number 20190091640
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Hajime NISHIDE
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190067047
- Publication date Feb 28, 2019
- SCREEN Holdings Co., Ltd.
- Shigeki TANIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20180207685
- Publication date Jul 26, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180158698
- Publication date Jun 7, 2018
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180085795
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Yuya TSUCHIHASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD
- Publication number 20180061678
- Publication date Mar 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180029089
- Publication date Feb 1, 2018
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD
- Publication number 20180025922
- Publication date Jan 25, 2018
- SCREEN Holdings Co., Ltd.
- Hiroki TSUJIKAWA
- B08 - CLEANING
Information Patent Application
CHEMICAL LIQUID PREPARATION METHOD OF PREPARING A CHEMICAL LIQUID F...
- Publication number 20170294323
- Publication date Oct 12, 2017
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160184870
- Publication date Jun 30, 2016
- SCREEN Holdings Co., Ltd.
- Atsuyasu MIURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150075571
- Publication date Mar 19, 2015
- DAINIPPON SCREEN MFG. CO., LTD.
- Atsuyasu Miura
- B08 - CLEANING
Information Patent Application
CHEMICAL LIQUID PREPARATION METHOD OF PREPARING A CHEMICAL LIQUID F...
- Publication number 20130306238
- Publication date Nov 21, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Atsuyasu MIURA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20130256273
- Publication date Oct 3, 2013
- Dainippon Screen Mfg. Co., Ltd.
- Atsuyasu MIURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Atsuyasu MIURA

Person

Patents Grantslast 30 patents

Chemical liquid preparation device, and substrate processing device

Substrate processing method and substrate processing device

Chemical liquid preparation method, chemical liquid preparation dev...

Substrate processing method and substrate processing apparatus

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and processing cup cleaning method

Recovery piping cleaning method and substrate processing apparatus

Substrate processing apparatus and nozzle cleaning method

Substrate processing method and substrate processing apparatus

Chemical liquid preparation method of preparing a chemical liquid f...

Substrate processing method

Substrate processing apparatus

Substrate treatment apparatus and substrate treatment method

Patents Applicationslast 30 patents

CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

RECOVERY PIPING CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND NOZZLE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING CUP CLEANING METHOD

CHEMICAL LIQUID PREPARATION METHOD OF PREPARING A CHEMICAL LIQUID F...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

CHEMICAL LIQUID PREPARATION METHOD OF PREPARING A CHEMICAL LIQUID F...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD