Atul Gupta

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Low-k b-doped SiC copper diffusion barrier films
- Patent number 7,842,604
- Issue date Nov 30, 2010
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron-doped SIC copper diffusion barrier films
- Patent number 7,420,275
- Issue date Sep 2, 2008
- Novellus Systems, Inc.
- Yongsik Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-k B-doped SiC copper diffusion barrier films
- Patent number 7,239,017
- Issue date Jul 3, 2007
- Novellus Systems, Inc.
- Yongsik Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods to retard copper diffusion and improve film adh...
- Patent number 6,764,952
- Issue date Jul 20, 2004
- Novellus Systems, Inc.
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...