Atul Gupta

Person

Lexington, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
- Patent number 12,075,554
- Issue date Aug 27, 2024
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid high-temperature electrostatic clamp for improved workpiece...
- Patent number 11,887,808
- Issue date Jan 30, 2024
- Axcelis Technologies, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
- Patent number 11,262,340
- Issue date Mar 1, 2022
- MKS Instruments, Inc.
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Grant
Radical output monitor for a remote plasma source and method of use
- Patent number 11,114,287
- Issue date Sep 7, 2021
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source having a dielectric plasma chamber with improved plas...
- Patent number 11,019,715
- Issue date May 25, 2021
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ignition of a plasma system and for monito...
- Patent number 10,910,798
- Issue date Feb 2, 2021
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Grant
Apparatus and method for ignition of a plasma system and for monito...
- Patent number 10,505,348
- Issue date Dec 10, 2019
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Blended energy ion implantation
- Publication number 20230038392
- Publication date Feb 9, 2023
- Axcelis Technologies, Inc.
- James S. DeLuca
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID HIGH-TEMPERATURE ELECTROSTATIC CLAMP FOR IMPROVED WORKPIECE...
- Publication number 20220148847
- Publication date May 12, 2022
- Axcelis Technologies, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
- Publication number 20210243876
- Publication date Aug 5, 2021
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...
- Publication number 20200099199
- Publication date Mar 26, 2020
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Application
Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...
- Publication number 20200022246
- Publication date Jan 16, 2020
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radical Output Monitor for a Remote Plasma Source and Method of Use
- Publication number 20190385829
- Publication date Dec 19, 2019
- MKS Instruments, Inc.
- Michael Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
- Publication number 20190170715
- Publication date Jun 6, 2019
- MKS Instruments
- Johannes Chiu
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...
- Publication number 20190089135
- Publication date Mar 21, 2019
- MKS Instruments, Inc.
- Atul Gupta
- B08 - CLEANING
Information Patent Application
PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS
- Publication number 20180195196
- Publication date Jul 12, 2018
- MKS Instruments, Inc.
- Chiu-Ying Tai
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Person

Patents Grantslast 30 patents

Plasma source having a dielectric plasma chamber with improved plas...

Hybrid high-temperature electrostatic clamp for improved workpiece...

Multi-sensor gas sampling detection system for radical gases and sh...

Radical output monitor for a remote plasma source and method of use

Plasma source having a dielectric plasma chamber with improved plas...

Apparatus and method for ignition of a plasma system and for monito...

Apparatus and method for ignition of a plasma system and for monito...

Patents Applicationslast 30 patents

Blended energy ion implantation

HYBRID HIGH-TEMPERATURE ELECTROSTATIC CLAMP FOR IMPROVED WORKPIECE...

Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...

APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...

Plasma Source Having a Dielectric Plasma Chamber with Improved Plas...

Radical Output Monitor for a Remote Plasma Source and Method of Use

Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...

APPARATUS AND METHOD FOR IGNITION OF A PLASMA SYSTEM AND FOR MONITO...

PROTECTIVE OXIDE COATING WITH REDUCED METAL CONCENTRATIONS