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Audrey CHARLES
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Wappingers Falls, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Silicon on insulator etch
Patent number
8,906,248
Issue date
Dec 9, 2014
Lam Research Corporation
Siyi Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SILICON ON INSULATOR ETCH
Publication number
20130149869
Publication date
Jun 13, 2013
LAM RESEARCH CORPORATION
Siyi LI
H01 - BASIC ELECTRIC ELEMENTS