Avgerinos V. Gelatos

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step pre-clean for selective metal gap fill
- Patent number 11,776,806
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods of protecting nickel and nickel containing...
- Patent number 11,658,014
- Issue date May 23, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for enhancing selectivity of titanium and tit...
- Patent number 11,430,661
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling contact resistance in cobalt-...
- Patent number 11,424,132
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit for a substrate support
- Patent number 11,387,134
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Muhannad Mustafa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step pre-clean for selective metal gap fill
- Patent number 11,380,536
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a metal gapfill
- Patent number 11,355,391
- Issue date Jun 7, 2022
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and method of forming a contact
- Patent number 11,114,320
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Gaurav Thareja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 10,985,023
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote hydrogen plasma titanium deposition to enhance selectivity a...
- Patent number 10,770,300
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Takashi Kuratomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 10,699,946
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-clean of silicon germanium for pre-metal contact at source and...
- Patent number 10,615,034
- Issue date Apr 7, 2020
- Applied Materials, Inc.
- Bo Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing semiconductor films
- Patent number 10,535,527
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Yi Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote hydrogen plasma titanium deposition to enhance selectivity a...
- Patent number 10,418,246
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 10,269,633
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Bhushan N. Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and methods
- Patent number 10,256,076
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Shi Wei Toh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective deposition of metal silicides via atomic laye...
- Patent number 10,199,230
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Seshadri Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-clean of silicon germanium for pre-metal contact at source and...
- Patent number 10,163,630
- Issue date Dec 25, 2018
- Applied Materials, Inc.
- Bo Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for dry etching cobalt metal using fluorine radicals
- Patent number 10,163,656
- Issue date Dec 25, 2018
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for thermally forming a selective cobalt layer
- Patent number 10,043,709
- Issue date Aug 7, 2018
- Applied Materials, Inc.
- Hua Ai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device conformity control by low temperature, low pressure, inducti...
- Patent number 10,008,388
- Issue date Jun 26, 2018
- Applied Materials, Inc.
- Ping Han Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of treating nitride films
- Patent number 9,966,275
- Issue date May 8, 2018
- Applied Materials, Inc.
- Brent Biggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 9,842,769
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for variable substrate temperature control
- Patent number 9,783,889
- Issue date Oct 10, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-clean of silicon germanium for pre-metal contact at source and...
- Patent number 9,735,009
- Issue date Aug 15, 2017
- Applied Materials, Inc.
- Bo Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 9,685,371
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preferential growth of cobalt within substrate features
- Patent number 9,637,819
- Issue date May 2, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 9,601,339
- Issue date Mar 21, 2017
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CAVITY SHAPING AND SELECTIVE METAL SILICIDE FORMATION FOR CMOS DEVICES
- Publication number 20240203741
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Nicolas Louis BREIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-TREATMENT FOR REMOVING RESIDUES FROM DIELECTRIC SURFACE
- Publication number 20240194605
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- Mohammad Mahdi TAVAKOLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Selective Metal Deposition Using Separated Reactant Activ...
- Publication number 20240191354
- Publication date Jun 13, 2024
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE MOSI DEPOSITION
- Publication number 20240079241
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Thomas Anthony Empante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Selective Molybdenum Deposition
- Publication number 20240052480
- Publication date Feb 15, 2024
- Avgerinos V. GELATOS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL CAP FOR CONTACT RESISTANCE REDUCTION
- Publication number 20240038859
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE CAPPING OF CONTACT LAYER FOR CMOS DEVICES
- Publication number 20240014076
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Nicolas Louis BREIL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED VERTICAL BITLINE FOR THREE-DIMENSIONAL (3D) DYNAMIC RA...
- Publication number 20230380145
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- Zhijun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230377892
- Publication date Nov 23, 2023
- Yiyang WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of Met...
- Publication number 20230287022
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Byunghoon Yoon
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CONDUCTIVE OXIDE SILICIDES FOR RELIABLE LOW CONTACT RESISTANCE
- Publication number 20230268415
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Michael Haverty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW CONTACT RESISTANCE UNSILICIDES FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20230268399
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Michael Haverty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICIDES, ALLOYS AND INTERMETALLICS TO MINIMIZE RESISTANCE
- Publication number 20230268414
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Michael Haverty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING METAL FILMS
- Publication number 20230227975
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE
- Publication number 20230187282
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Thomas Anthony Empante
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...
- Publication number 20220359209
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS KIT FOR A SUBSTRATE SUPPORT
- Publication number 20220344134
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- MUHANNAD MUSTAFA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-TITANIUM STRUC...
- Publication number 20220336227
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STEP PRE-CLEAN FOR SELECTIVE METAL GAP FILL
- Publication number 20220270871
- Publication date Aug 25, 2022
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CAP FOR CONTACT RESISTANCE REDUCTION
- Publication number 20220231137
- Publication date Jul 21, 2022
- Applied Materials, Inc.
- Bencherki Mebarki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ruthenium Reflow For Via Fill
- Publication number 20220223472
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Yi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Step Pre-Clean for Selective Metal Gap Fill
- Publication number 20210351032
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...
- Publication number 20210319983
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
- Publication number 20210225655
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Xinyu Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A METAL GAPFILL
- Publication number 20200303250
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Xi CEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE
- Publication number 20200251340
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- ROEY SHAVIV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...
- Publication number 20200211852
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM AND METHOD OF FORMING A CONTACT
- Publication number 20200203481
- Publication date Jun 25, 2020
- Applied Materials, Inc.
- Gaurav THAREJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-...
- Publication number 20200144073
- Publication date May 7, 2020
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...
- Publication number 20200013627
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Avgerinos V. Gelatos

Person

Patents Grantslast 30 patents

Methods for depositing fluorine/carbon-free conformal tungsten

Multi-step pre-clean for selective metal gap fill

Apparatuses and methods of protecting nickel and nickel containing...

Substrate processing chamber having heated showerhead assembly

Methods and apparatus for enhancing selectivity of titanium and tit...

Methods and apparatus for controlling contact resistance in cobalt-...

Process kit for a substrate support

Multi-step pre-clean for selective metal gap fill

Method for forming a metal gapfill

Processing system and method of forming a contact

Methods for depositing fluorine/carbon-free conformal tungsten

Remote hydrogen plasma titanium deposition to enhance selectivity a...

Method of enabling seamless cobalt gap-fill

Pre-clean of silicon germanium for pre-metal contact at source and...

Methods for depositing semiconductor films

Remote hydrogen plasma titanium deposition to enhance selectivity a...

Method of enabling seamless cobalt gap-fill

Substrate processing apparatus and methods

Methods for selective deposition of metal silicides via atomic laye...

Pre-clean of silicon germanium for pre-metal contact at source and...

Methods for dry etching cobalt metal using fluorine radicals

Methods for thermally forming a selective cobalt layer

Device conformity control by low temperature, low pressure, inducti...

Methods of treating nitride films

Method of enabling seamless cobalt gap-fill

Apparatus for variable substrate temperature control

Pre-clean of silicon germanium for pre-metal contact at source and...

Method of enabling seamless cobalt gap-fill

Methods for preferential growth of cobalt within substrate features

Methods for depositing fluorine/carbon-free conformal tungsten

Patents Applicationslast 30 patents

CAVITY SHAPING AND SELECTIVE METAL SILICIDE FORMATION FOR CMOS DEVICES

POST-TREATMENT FOR REMOVING RESIDUES FROM DIELECTRIC SURFACE

Method of Selective Metal Deposition Using Separated Reactant Activ...

SELECTIVE MOSI DEPOSITION

Methods for Selective Molybdenum Deposition

METAL CAP FOR CONTACT RESISTANCE REDUCTION

SELECTIVE CAPPING OF CONTACT LAYER FOR CMOS DEVICES

SELF-ALIGNED VERTICAL BITLINE FOR THREE-DIMENSIONAL (3D) DYNAMIC RA...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Non-Halide Oxygen-Free Organometallic Precursors for ALD/CVD of Met...

CONDUCTIVE OXIDE SILICIDES FOR RELIABLE LOW CONTACT RESISTANCE

LOW CONTACT RESISTANCE UNSILICIDES FOR SEMICONDUCTOR APPLICATIONS

SILICIDES, ALLOYS AND INTERMETALLICS TO MINIMIZE RESISTANCE

METHOD OF DEPOSITING METAL FILMS

DUAL SILICIDE PROCESS USING RUTHENIUM SILICIDE

METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...

PROCESS KIT FOR A SUBSTRATE SUPPORT

METHODS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-TITANIUM STRUC...

MULTI-STEP PRE-CLEAN FOR SELECTIVE METAL GAP FILL

METAL CAP FOR CONTACT RESISTANCE REDUCTION

Ruthenium Reflow For Via Fill

Multi-Step Pre-Clean for Selective Metal Gap Fill

APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...

Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten

METHOD FOR FORMING A METAL GAPFILL

METHODS AND APPARATUS FOR FILLING A FEATURE DISPOSED IN A SUBSTRATE

METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...

PROCESSING SYSTEM AND METHOD OF FORMING A CONTACT

METHODS AND APPARATUS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-...

Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...