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Avijit K. Ray-Chaudhuri
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Low thermal distortion extreme-UV lithography reticle
Patent number
6,441,885
Issue date
Aug 27, 2002
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low thermal distortion Extreme-UV lithography reticle and method
Patent number
6,395,455
Issue date
May 28, 2002
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Low thermal distortion extreme-UV lithography reticle
Patent number
6,316,150
Issue date
Nov 13, 2001
EUV LLC
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Diffractive element in extreme-UV lithography condenser
Patent number
6,285,497
Issue date
Sep 4, 2001
EUV LLC
William C. Sweatt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for mask repair using defect compensation
Patent number
6,235,434
Issue date
May 22, 2001
EUV LLC
Donald W. Sweeney
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Surface figure control for coated optics
Patent number
6,206,528
Issue date
Mar 27, 2001
EUV LLC
Avijit K. Ray-Chaudhuri
G02 - OPTICS
Information
Patent Grant
Wafer chamber having a gas curtain for extreme-UV lithography
Patent number
6,198,792
Issue date
Mar 6, 2001
EUV LLC
Michael P. Kanouff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Radiation flux monitor for EUV lithography
Publication number
20020190642
Publication date
Dec 19, 2002
Kurt W. Berger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Low thermal distortion extreme-UV lithography reticle
Publication number
20020006556
Publication date
Jan 17, 2002
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY
Information
Patent Application
Low thermal distortion Extreme-UV lithography reticle
Publication number
20020001760
Publication date
Jan 3, 2002
Steven E. Gianoulakis
B82 - NANO-TECHNOLOGY