Avinash Shervegar

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma source for spatial plasma enhanced atomic layer de...
- Patent number 11,823,871
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Jozef Kudela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Workpiece Processing Apparatus with Contact Temperature Sensor
- Publication number 20240222094
- Publication date Jul 4, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Zhaotong Yang
- G01 - MEASURING TESTING
Information Patent Application
IN-SITU EPI GROWTH RATE CONTROL OF CRYSTAL THICKNESS MICRO-BALANCIN...
- Publication number 20220380932
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer De...
- Publication number 20210050187
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Jozef Kudela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microwave Plasma Source With Split Window
- Publication number 20190311886
- Publication date Oct 10, 2019
- Applied Materials, Inc.
- Siva Chandrasekar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...