AVIV BALAN

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Six degree of freedom workpiece stage
- Patent number 11,209,373
- Issue date Dec 28, 2021
- KLA Corporation
- Aviv Balan
- G01 - MEASURING TESTING
Information Patent Grant
Stage apparatus for semiconductor inspection and lithography systems
- Patent number 9,529,280
- Issue date Dec 27, 2016
- KLA-Tencor Corporation
- Aviv Balan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Active planar autofocus
- Patent number 8,643,835
- Issue date Feb 4, 2014
- KLA-Tencor Corporation
- Scott A. Young
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SIX DEGREE OF FREEDOM WORKPIECE STAGE
- Publication number 20200400588
- Publication date Dec 24, 2020
- KLA Corporation
- Aviv Balan
- G01 - MEASURING TESTING
Information Patent Application
STAGE APPARATUS FOR SEMICONDUCTOR INSPECTION AND LITHOGRAPHY SYSTEMS
- Publication number 20150160564
- Publication date Jun 11, 2015
- KLA-Tencor Corporation
- AVIV BALAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Active Planar Autofocus
- Publication number 20120008137
- Publication date Jan 12, 2012
- KLA-Tencor Corporation
- Scott A. Young
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE CHUCK SCANNING STAGE
- Publication number 20090153824
- Publication date Jun 18, 2009
- KLA-Tencor Corporation
- AVIV BALAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY