Aviv Balan

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-stage, multi-zone substrate positioning systems
- Patent number 11,637,030
- Issue date Apr 25, 2023
- KLA Corporation
- Yoram Uziel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slotted electrostatic chuck
- Patent number 11,121,019
- Issue date Sep 14, 2021
- KLA Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for chucking a warped wafer
- Patent number 10,468,288
- Issue date Nov 5, 2019
- KLA-Tencor Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating wafer chuck
- Patent number 10,083,852
- Issue date Sep 25, 2018
- KLA-Tencor Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual scanning stage
- Patent number 8,924,014
- Issue date Dec 30, 2014
- KLA-Tencor Technologies, Inc.
- Aviv Balan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual scanning stage
- Patent number 8,285,418
- Issue date Oct 9, 2012
- KLA-Tencor Corporation
- Aviv Balan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Non contact substrate chuck
- Patent number 7,992,877
- Issue date Aug 9, 2011
- KLA-Tencor Corporation
- Aviv Balan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Multi-Stage, Multi-Zone Substrate Positioning Systems
- Publication number 20200402827
- Publication date Dec 24, 2020
- KLA Corporation
- Yoram Uziel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slotted Electrostatic Chuck
- Publication number 20190385882
- Publication date Dec 19, 2019
- KLA-Tencor Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Chucking a Warped Wafer
- Publication number 20180108559
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Scanning Stage
- Publication number 20130073082
- Publication date Mar 21, 2013
- KLA-Tencor Corporation
- Aviv Balan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Dual Scanning Stage
- Publication number 20110022227
- Publication date Jan 27, 2011
- KLA-Tencor Corporation
- Aviv Balan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Non Contact Substrate Chuck
- Publication number 20090067114
- Publication date Mar 12, 2009
- KLA-Tencor Technologies Corporation
- Aviv Balan
- H01 - BASIC ELECTRIC ELEMENTS