Axel DOCHNAHL

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Rosenberg, DE

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Patents Applicationslast 30 patents

Information Patent Application
REFLECTIVE OPTICAL ELEMENT AND METHOD FOR OPERATING AN EUV LITHOGRA...
- Publication number 20120250144
- Publication date Oct 4, 2012
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- G02 - OPTICS