Axel Feicke

Follow

Person

Chemnitz, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing a photomask, method for patterning a layer or...
- Patent number 7,820,343
- Issue date Oct 26, 2010
- Advanced Mask Technology Center GmbH & Co. KG
- Markus Waiblinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining an exposure dose and exposure apparatus
- Patent number 7,811,727
- Issue date Oct 12, 2010
- Advanced Mask Technology Center GmbH & Co. KG
- Martin Sczyrba
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method for Producing a Photomask, Method for Patterning a Layer or...
- Publication number 20080102382
- Publication date May 1, 2008
- Advanced Mask Technology Center GmbH & Co. KG
- Markus Waiblinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining an exposure dose and exposure apparatus
- Publication number 20070117032
- Publication date May 24, 2007
- Advantage Mask Technology Center GmbH & Co. KG
- Martin Sczyrba
- B82 - NANO-TECHNOLOGY