Axel Scholz

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for microlithography
- Patent number 10,088,754
- Issue date Oct 2, 2018
- Carl Zeiss SMT GmbH
- Axel Scholz
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 9,753,375
- Issue date Sep 5, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 9,606,441
- Issue date Mar 28, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,575,414
- Issue date Feb 21, 2017
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 9,280,060
- Issue date Mar 8, 2016
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 9,217,930
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for microlithography
- Patent number 8,873,023
- Issue date Oct 28, 2014
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 8,730,455
- Issue date May 20, 2014
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical integrator for an illumination system of a microlithographi...
- Patent number 8,520,307
- Issue date Aug 27, 2013
- Carl Zeiss SMT GmbH
- Oliver Wolf
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 8,513,628
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for indirect determination of local irradiance in...
- Patent number 8,454,230
- Issue date Jun 4, 2013
- Carl Zeiss SMT GmbH
- Frank Melzer
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 8,395,756
- Issue date Mar 12, 2013
- Carl Zeiss SMT GmbH
- Johannes Wangler
- G02 - OPTICS
Information Patent Grant
Illumination system for a microlithographic projection exposure app...
- Patent number 8,004,656
- Issue date Aug 23, 2011
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Transmission filter apparatus
- Patent number 7,940,375
- Issue date May 10, 2011
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G02 - OPTICS
Information Patent Grant
Optical integrator for an illumination system of a microlithographi...
- Patent number 7,880,969
- Issue date Feb 1, 2011
- Carl Zeiss SMT AG
- Oliver Wolf
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
EUV illumination system with a system for measuring fluctuations of...
- Patent number 7,875,865
- Issue date Jan 25, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination system and polarizer for a microlithographic projectio...
- Patent number 7,847,920
- Issue date Dec 7, 2010
- Carl Zeiss SMT AG
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for indirect determination of local irradiance in...
- Patent number 7,686,505
- Issue date Mar 30, 2010
- Carl Zeiss SMT AG
- Frank Meltzer
- G01 - MEASURING TESTING
Information Patent Grant
Illumination system for a wavelength of ≦ 193 nm, with sensors for...
- Patent number 7,473,907
- Issue date Jan 6, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system and polarizer for a microlithographic projectio...
- Patent number 7,408,622
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20170192361
- Publication date Jul 6, 2017
- Carl Zeiss SMT GMBH
- Axel Scholz
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20160161858
- Publication date Jun 9, 2016
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20160077446
- Publication date Mar 17, 2016
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20150022798
- Publication date Jan 22, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
- Publication number 20150015862
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20130148092
- Publication date Jun 13, 2013
- Carl Zeiss SMT GMBH
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20120019796
- Publication date Jan 26, 2012
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20110285978
- Publication date Nov 24, 2011
- Carl Zeiss SMT GMBH
- Damian FIOLKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...
- Publication number 20110083542
- Publication date Apr 14, 2011
- Carl Zeiss SMT GMBH
- Oliver Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20110079737
- Publication date Apr 7, 2011
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR INDIRECT DETERMINATION OF LOCAL IRRADIANCE IN...
- Publication number 20100141917
- Publication date Jun 10, 2010
- Carl Zeiss SMT AG
- Frank Meltzer
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...
- Publication number 20090021839
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Oliver Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20090021716
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Johannes Wangler
- G02 - OPTICS
Information Patent Application
EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...
- Publication number 20080258070
- Publication date Oct 23, 2008
- Carl Zeiss SMT AG
- Axel Scholz
- G01 - MEASURING TESTING
Information Patent Application
Illumination system and polarizer for a microlithographic projectio...
- Publication number 20080239273
- Publication date Oct 2, 2008
- Carl Zeiss SMT AG, a German corporation
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Transmission Filter Apparatus
- Publication number 20070279613
- Publication date Dec 6, 2007
- Carl Zeiss SMT AG
- Damian Fiolka
- G02 - OPTICS
Information Patent Application
Illumination system for a microlithographic projection exposure app...
- Publication number 20070206171
- Publication date Sep 6, 2007
- Carl Zeiss SMT AG
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for indirect determination of local irradiance in...
- Publication number 20060222044
- Publication date Oct 5, 2006
- Carl Zeiss SMT AG
- Frank Melzer
- G01 - MEASURING TESTING
Information Patent Application
Illumination system for a wavelength of less than or equal to 193 n...
- Publication number 20050274897
- Publication date Dec 15, 2005
- Carl Zeiss SMT AG and ASML Netherlands
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system and polarizer for a microlithographic projectio...
- Publication number 20050140958
- Publication date Jun 30, 2005
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Axel Scholz

Person

Patents Grantslast 30 patents

Illumination system for microlithography

Illumination optical unit for projection lithography

Illumination system for microlithography

Illumination system for a microlithographic projection exposure app...

Illumination system for microlithography

Illumination system for a microlithographic projection exposure app...

Illumination system for microlithography

Illumination system for a microlithographic projection exposure app...

Optical integrator for an illumination system of a microlithographi...

EUV illumination system with a system for measuring fluctuations of...

Method and system for indirect determination of local irradiance in...

Illumination system for a microlithographic projection exposure app...

Illumination system for a microlithographic projection exposure app...

Transmission filter apparatus

Optical integrator for an illumination system of a microlithographi...

EUV illumination system with a system for measuring fluctuations of...

Illumination system and polarizer for a microlithographic projectio...

Method and system for indirect determination of local irradiance in...

Illumination system for a wavelength of ≦ 193 nm, with sensors for...

Illumination system and polarizer for a microlithographic projectio...

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...

EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...

METHOD AND SYSTEM FOR INDIRECT DETERMINATION OF LOCAL IRRADIANCE IN...

OPTICAL INTEGRATOR FOR AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHI...

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

EUV ILLUMINATION SYSTEM WITH A SYSTEM FOR MEASURING FLUCTUATIONS OF...

Illumination system and polarizer for a microlithographic projectio...

Transmission Filter Apparatus

Illumination system for a microlithographic projection exposure app...

Method and system for indirect determination of local irradiance in...

Illumination system for a wavelength of less than or equal to 193 n...

Illumination system and polarizer for a microlithographic projectio...