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Axel Zibold
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for measuring of masks for the photo-lithography
Patent number
8,730,474
Issue date
May 20, 2014
Carl Zeiss SMS GmbH
Thomas Scheruebl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for mask inspection for mask design and mask production
Patent number
8,705,838
Issue date
Apr 22, 2014
Carl Zeiss SMS GmbH
Klaus Boehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for repairing phase shift masks
Patent number
8,268,516
Issue date
Sep 18, 2012
Carl Zeiss SMS GmbH
Axel Zibold
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and arrangement for repairing photolithography masks
Patent number
7,916,930
Issue date
Mar 29, 2011
Carl Zeiss SMS GmbH
Axel Zibold
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflective X-ray microscope and inspection system for examining obj...
Patent number
7,623,620
Issue date
Nov 24, 2009
Carl Zeiss SMT AG
Hans-Jürgen Mann
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING OF MASKS FOR THE PHOTO-LITHOGRAPHY
Publication number
20110016437
Publication date
Jan 20, 2011
Thomas Scherübl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR REPAIRING PHASE SHIFT MASKS
Publication number
20100266937
Publication date
Oct 21, 2010
CARL ZEISS SMS GMBH
Axel Zibold
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for Mask Inspection for Mask Design and Mask Production
Publication number
20080247632
Publication date
Oct 9, 2008
Klaus Boehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for the repair of photolithography masks
Publication number
20080069431
Publication date
Mar 20, 2008
Axel Zibold
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Arrangement of aperture diaphragms and/or filters, with changeable...
Publication number
20060291031
Publication date
Dec 28, 2006
Klaus Boehm
G02 - OPTICS
Information
Patent Application
Arrangement for the production of photomasks
Publication number
20060154150
Publication date
Jul 13, 2006
Thomas Engel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reflective X-ray microscope and inspection system for examining obj...
Publication number
20050201514
Publication date
Sep 15, 2005
Hans-Jurgen Mann
B82 - NANO-TECHNOLOGY