Ayako ITO

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Patents Grantslast 30 patents

Information Patent Grant
Antenna device, radiation method of electromagnetic waves, plasma p...
- Patent number 10,896,811
- Issue date Jan 19, 2021
- Tokyo Electron Limited
- Ayako Ito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Antenna device and plasma processing apparatus
- Patent number 10,553,402
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Yuki Kawada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ANTENNA DEVICE, RADIATION METHOD OF ELECTROMAGNETIC WAVES, PLASMA P...
- Publication number 20200075292
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Ayako ITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190333736
- Publication date Oct 31, 2019
- TOKYO ELECTRON LIMITED
- Yuki KAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20190279845
- Publication date Sep 12, 2019
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS