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Ayako Kusaka
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Polymer compound, negative resist composition, and method of formin...
Patent number
7,820,360
Issue date
Oct 26, 2010
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Negative resist composition and method of forming resist pattern
Patent number
7,582,409
Issue date
Sep 1, 2009
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
POLYMER COMPOUND, NEGATIVE RESIST COMPOSITION, AND METHOD OF FORMIN...
Publication number
20090162785
Publication date
Jun 25, 2009
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
NEGATIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20090142698
Publication date
Jun 4, 2009
Tokyo Ohka Kogyo Co., Ltd.
Jun Iwashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY