Ayako Sugaya

Follow

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Position detector and microlithography apparatus comprising same
- Patent number 5,936,253
- Issue date Aug 10, 1999
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detection apparatus and aligner comprising same
- Patent number 5,859,707
- Issue date Jan 12, 1999
- Nikon Corporation
- Masahiro Nakagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for alignment with a substrate, using coma imp...
- Patent number 5,783,833
- Issue date Jul 21, 1998
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,754,299
- Issue date May 19, 1998
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting apparatus and projection exposure apparatus
- Patent number 5,684,569
- Issue date Nov 4, 1997
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection apparatus and method for optical system, exposure appara...
- Patent number 5,680,200
- Issue date Oct 21, 1997
- Nikon Corporation
- Ayako Sugaya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY