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Ayana YAMAMOTO
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam device
Patent number
9,666,410
Issue date
May 30, 2017
Hitachi High-Technologies Corporation
Takefumi Kakinuma
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged Particle Beam Device
Publication number
20160172154
Publication date
Jun 16, 2016
Hitachi High-Technologies Corporation
Takefumi KAKINUMA
H01 - BASIC ELECTRIC ELEMENTS