Ayano HAGIWARA

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and apparatus
- Patent number 11,373,874
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching silicon-containing film, computer-readable storag...
- Patent number 11,189,498
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 10,665,470
- Issue date May 26, 2020
- Tokyo Electron Limited
- Yasuo Asada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and storage medium
- Patent number 9,607,855
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND APPARATUS
- Publication number 20200312669
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Etching Apparatus
- Publication number 20200234974
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING SILICON-CONTAINING FILM, COMPUTER-READABLE STORAG...
- Publication number 20190355589
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Takehiko ORII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20190198349
- Publication date Jun 27, 2019
- TOKYO ELECTRON LIMITED
- Yasuo ASADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20160225637
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS