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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Double-layer shutter sputtering apparatus
Patent number
8,900,426
Issue date
Dec 2, 2014
Canon Anelva Corporation
Shuji Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, and magnetic recording medium manuf...
Patent number
8,601,978
Issue date
Dec 10, 2013
Canon Anelva Corporation
Kazuto Yamanaka
G11 - INFORMATION STORAGE
Information
Patent Grant
Ion beam generator, and substrate processing apparatus and producti...
Patent number
8,536,539
Issue date
Sep 17, 2013
Canon Anelva Corporation
Hirohisa Hirayanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, and magnetic recording medium manuf...
Patent number
8,281,740
Issue date
Oct 9, 2012
Canon Anelva Corporation
Kazuto Yamanaka
G11 - INFORMATION STORAGE
Information
Patent Grant
Double-layer shutter control method of multi-sputtering system
Patent number
7,850,827
Issue date
Dec 14, 2010
Canon Anelva Corporation
Shuji Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetic multi-layer film manufacturing apparatus
Patent number
6,641,703
Issue date
Nov 4, 2003
Anelva Corporation
Shuji Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND M...
Publication number
20120104274
Publication date
May 3, 2012
Canon ANELVA Corporation
Hirohisa Hirayanagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DOUBLE-LAYER SHUTTER SPUTTERING APPARATUS
Publication number
20120097533
Publication date
Apr 26, 2012
Canon ANELVA Corporation
Shuji NOMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Ion Beam Generator, and Substrate Processing Apparatus and Producti...
Publication number
20110147200
Publication date
Jun 23, 2011
Canon ANELVA Corporation
Hirohisa Hirayanagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, AND MAGNETIC RECORDING MEDIUM MANUF...
Publication number
20100028529
Publication date
Feb 4, 2010
Canon ANELVA Corporation
Kazuto Yamanaka
G11 - INFORMATION STORAGE
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, AND MAGNETIC RECORDING MEDIUM MANUF...
Publication number
20100025363
Publication date
Feb 4, 2010
Canon ANELVA Corporation
Kazuto Yamanaka
G11 - INFORMATION STORAGE
Information
Patent Application
DOUBLE-LAYER SHUTTER CONTROL METHOD OF MULTI-SPUTTERING SYSTEM
Publication number
20090139865
Publication date
Jun 4, 2009
Canon ANELVA Corporation
Shuji Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Double-layer shutter control method of multi-sputtering system
Publication number
20050199490
Publication date
Sep 15, 2005
ANELVA CORPORATION
Shuji Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetic multi-layer film manufacturing apparatus
Publication number
20020064595
Publication date
May 30, 2002
Shuji Nomura
B82 - NANO-TECHNOLOGY