Ayuta SUZUKI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus
- Patent number 12,027,344
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Shinya Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,664,198
- Issue date May 30, 2023
- Tokyo Electron Limited
- Hirofumi Ohta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,847,348
- Issue date Nov 24, 2020
- Tokyo Electron Limited
- Toshiya Tsukahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and method of forming...
- Patent number 10,734,221
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Taiki Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,121,680
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Munehito Kagaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 9,441,292
- Issue date Sep 13, 2016
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid processing apparatus, liquid processing method, and recordin...
- Patent number 9,202,731
- Issue date Dec 1, 2015
- Tokyo Electron Limited
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, etching apparatus, and ring member
- Patent number 8,945,413
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Ayuta Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE
- Publication number 20230062662
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- Ayuta SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230051432
- Publication date Feb 16, 2023
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200312634
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi OHTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200176226
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Toshiya Tsukahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20190385815
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Shinya IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...
- Publication number 20190013195
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Taiki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180166298
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Munehito KAGAYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180158671
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY AND EXHAUST STRUCTURE
- Publication number 20180155830
- Publication date Jun 7, 2018
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
- Publication number 20150206763
- Publication date Jul 23, 2015
- TOKYO ELECTRON LIMITED
- Ayuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER
- Publication number 20130186858
- Publication date Jul 25, 2013
- TOKYO ELECTRON LIMITED
- Ayuta SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid Processing Apparatus, Liquid Processing Method, and Recordin...
- Publication number 20120160274
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Shigeru Kasai
- H01 - BASIC ELECTRIC ELEMENTS

Ayuta SUZUKI

Person

Patents Grantslast 30 patents

Film forming apparatus

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Method of manufacturing semiconductor device and method of forming...

Film forming apparatus and film forming method

Substrate processing apparatus

Etching method, etching apparatus, and ring member

Liquid processing apparatus, liquid processing method, and recordin...

Etching method, etching apparatus, and ring member

Patents Applicationslast 30 patents

MEASUREMENT SYSTEM, MEASUREMENT METHOD, AND PLASMA PROCESSING DEVICE

FILM FORMING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

FILM FORMING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...

SUBSTRATE PROCESSING APPARATUS

FILM FORMING APPARATUS AND FILM FORMING METHOD

GAS SUPPLY AND EXHAUST STRUCTURE

ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER

ETCHING METHOD, ETCHING APPARATUS, AND RING MEMBER

Liquid Processing Apparatus, Liquid Processing Method, and Recordin...