Badri N. RAMAMURTHI

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning assemblies for substrate processing chambers
- Patent number 12,012,653
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas mixer to enable RPS purging
- Patent number 11,862,475
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,827,980
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Uniform in situ cleaning and deposition
- Patent number 11,742,185
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,643,725
- Issue date May 9, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber and methods for cleaning the same
- Patent number 11,532,463
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B08 - CLEANING
Information Patent Grant
Isolator apparatus and methods for substrate processing chambers
- Patent number 11,492,705
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20240368756
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Yuxing ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20240352580
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE
- Publication number 20240047185
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhijit A. Kangude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20230402261
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20230392259
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF
- Publication number 20230265560
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Badri Narayan Ramamurthi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOWNSTREAM RESIDUE MANAGEMENT HARDWARE
- Publication number 20230120710
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Zaoyuan Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230047451
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20220307129
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Yuxing Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...
- Publication number 20220307135
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM IN SITU CLEANING AND DEPOSITION
- Publication number 20220310360
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Saket Rathi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE
- Publication number 20220199373
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS MIXER TO ENABLE RPS PURGING
- Publication number 20220122851
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION
- Publication number 20220064797
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay DHANAKSHIRUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS
- Publication number 20220028710
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20220020615
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL
- Publication number 20220005723
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20210320017
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER AND METHODS FOR CLEANING THE SAME
- Publication number 20210035781
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20210002763
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Nitin PATHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Badri N. RAMAMURTHI

Person

Patents Grantslast 30 patents

Systems and methods for substrate support temperature control

Cleaning assemblies for substrate processing chambers

Hardware to prevent bottom purge incursion in application volume an...

Gas mixer to enable RPS purging

Isolator apparatus and methods for substrate processing chambers

Uniform in situ cleaning and deposition

Hardware to prevent bottom purge incursion in application volume an...

Semiconductor processing chamber and methods for cleaning the same

Isolator apparatus and methods for substrate processing chambers

Patents Applicationslast 30 patents

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

SIDE PUMPING CHAMBER AND DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

SHARED RPS CLEAN AND BYPASS DELIVERY ARCHITECTURE

UNIFORM IN SITU CLEANING AND DEPOSITION

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

PUMPING LINER AND METHODS OF MANUFACTURE AND USE THEREOF

DOWNSTREAM RESIDUE MANAGEMENT HARDWARE

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

CLEANING ASSEMBLIES FOR SUBSTRATE PROCESSING CHAMBERS

HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AN...

UNIFORM IN SITU CLEANING AND DEPOSITION

METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE

GAS MIXER TO ENABLE RPS PURGING

SHOWERHEAD DESIGN TO CONTROL STRAY DEPOSITION

DISTRIBUTION COMPONENTS FOR SEMICONDUCTOR PROCESSING SYSTEMS

MULTIPLE PROCESS SEMICONDUCTOR PROCESSING SYSTEM

ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

BOTTOM PURGE FOR SEMICONDUCTOR PROCESSING SYSTEM

SEMICONDUCTOR PROCESSING CHAMBER AND METHODS FOR CLEANING THE SAME

ISOLATOR APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS