Baerbel Schwaer

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 9,164,396
- Issue date Oct 20, 2015
- Carl Zeiss SMT GmbH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 8,319,944
- Issue date Nov 27, 2012
- Carl Zeiss SMT GmbH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,990,622
- Issue date Aug 2, 2011
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,830,611
- Issue date Nov 9, 2010
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 7,782,440
- Issue date Aug 24, 2010
- Carl Zeiss SMT AG
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...
- Publication number 20130070224
- Publication date Mar 21, 2013
- Carl Zeiss SMT GMBH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20110019169
- Publication date Jan 27, 2011
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD
- Publication number 20100128367
- Publication date May 27, 2010
- Carl Zeiss SMT AG
- Mariella Beckenbach
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20080239503
- Publication date Oct 2, 2008
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
Projection Lens System of a Microlithographic Projection Exposure I...
- Publication number 20080106711
- Publication date May 8, 2008
- Carl Zeiss SMT AG
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Baerbel Schwaer

Person

Patents Grantslast 30 patents

Projection lens system of a microlithographic projection exposure i...

Projection lens system of a microlithographic projection exposure i...

Projection objective of a microlithographic projection exposure app...

Projection objective of a microlithographic projection exposure app...

Projection lens system of a microlithographic projection exposure i...

Imaging device in a projection exposure machine

Patents Applicationslast 30 patents

PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHY APPARATUS AND METHOD

Imaging Device in a Projection Exposure Machine

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

Projection Lens System of a Microlithographic Projection Exposure I...

Imaging device in a projection exposure machine