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Balaji Ganapathy
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Union City, CA, US
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last 30 patents
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Patent Grant
Techniques and systems for model-based critical dimension measurements
Patent number
9,875,534
Issue date
Jan 23, 2018
KLA-Tencor Corporation
Abdurrahman Sezginer
G06 - COMPUTING CALCULATING COUNTING
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last 30 patents
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Patent Application
TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS
Publication number
20170069080
Publication date
Mar 9, 2017
KLA-Tencor Corporation
Abdurrahman Sezginer
G06 - COMPUTING CALCULATING COUNTING