Ban ITO

Follow

Person

Tokyo, JP

People

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS
- Publication number 20240033876
- Publication date Feb 1, 2024
- EBARA CORPORATION
- Shumpei MIURA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR ESTIMATING LIFE OF POLISHING PAD AND POLISHING DEVICE
- Publication number 20230381910
- Publication date Nov 30, 2023
- EBARA CORPORATION
- KENICHIRO SAITO
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20230321696
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Hiroki TAKAHASHI
- B08 - CLEANING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20230294241
- Publication date Sep 21, 2023
- EBARA CORPORATION
- Ban ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND COMPUTER-READABLE STORAG...
- Publication number 20230139947
- Publication date May 4, 2023
- EBARA CORPORATION
- Ban ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20220347814
- Publication date Nov 3, 2022
- EBARA CORPORATION
- BAN ITO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING END POINT DETECTION METHOD AND POLISHING END POINT DETECT...
- Publication number 20150183084
- Publication date Jul 2, 2015
- EBARA CORPORATION
- Ban ITO
- B24 - GRINDING POLISHING