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Ban Zhu

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  • Shanghai, CN
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Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR IN SITU CLEANING OF MOCVD REACTION CHAMBER
    • Publication number 20140083453
    • Publication date Mar 27, 2014
    • ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
    • Gerald Zheyao Yin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...