Bang-ching Ho

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Silicon-containing EUV resist underlayer film forming composition
- Patent number 9,337,052
- Issue date May 10, 2016
- Nissan Chemical Industries, Ltd.
- Shuhei Shigaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
SILICON-CONTAINING EUV RESIST UNDERLAYER FILM FORMING COMPOSITION
- Publication number 20140232018
- Publication date Aug 21, 2014
- Shuhei Shigaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...