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Yorktown Heights, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Wet clean process for removing CxHyFz etch residue
- Patent number 10,167,443
- Issue date Jan 1, 2019
- International Business Machines Corporation
- Robert L. Bruce
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Etch rate enhancement for a silicon etch process through etch chamb...
- Patent number 9,711,365
- Issue date Jul 18, 2017
- International Business Machines Corporation
- Eric A. Joseph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet clean process for removing CxHyFz etch residue
- Patent number 9,536,731
- Issue date Jan 3, 2017
- International Business Machines Corporation
- Robert L. Bruce
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Sidewall image transfer for heavy metal patterning in integrated ci...
- Patent number 9,171,796
- Issue date Oct 27, 2015
- International Business Machines Corporation
- Markus Brink
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE
- Publication number 20170044470
- Publication date Feb 16, 2017
- International Business Machines Corporation
- Robert L. Bruce
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
ETCH RATE ENHANCEMENT FOR A SILICON ETCH PROCESS THROUH ETCH CHAMBE...
- Publication number 20150318182
- Publication date Nov 5, 2015
- Zeon Corporation
- Eric A. Joseph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE
- Publication number 20150118839
- Publication date Apr 30, 2015
- International Business Machines Corporation
- Robert L. Bruce
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...