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Toyama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Composition for forming resist overlayer film for EUV lithography
Patent number
11,675,269
Issue date
Jun 13, 2023
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition for forming resist underlayer film with reduced outgassing
Patent number
10,437,150
Issue date
Oct 8, 2019
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Polymer-containing developer
Patent number
9,753,369
Issue date
Sep 5, 2017
NISSAN CHEMICAL IDUSTRIES, LTD.
Rikimaru Sakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Silicon-containing EUV resist underlayer film-forming composition i...
Patent number
9,627,217
Issue date
Apr 18, 2017
Nissan Chemical Industries, Ltd.
Shuhei Shigaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist overlayer film forming composition for lithography and metho...
Patent number
9,494,864
Issue date
Nov 15, 2016
Nissan Chemical Industries, Ltd.
Ryuji Ohnishi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist underlayer film-forming composition for EUV lithography cont...
Patent number
9,240,327
Issue date
Jan 19, 2016
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition for forming resist underlayer film for EUV lithography
Patent number
9,005,873
Issue date
Apr 14, 2015
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist underlayer film forming composition, and method for forming...
Patent number
8,722,840
Issue date
May 13, 2014
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
RESIST OVERLAYER FILM FORMING COMPOSITION FOR LITHOGRAPHY AND METHO...
Publication number
20150248057
Publication date
Sep 3, 2015
Nissan Chemical Industries, Ltd.
Ryuji Ohnishi
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SILICON-CONTAINING EUV RESIST UNDERLAYER FILM-FORMING COMPOSITION I...
Publication number
20150079792
Publication date
Mar 19, 2015
Nissan Chemical Industries, Ltd.
Shuhei Shigaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION FOR EUV LITHOGRAPHY CONT...
Publication number
20140170567
Publication date
Jun 19, 2014
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM FOR EUV LITHOGRAPHY
Publication number
20140099791
Publication date
Apr 10, 2014
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLYMER-CONTAINING DEVELOPER
Publication number
20140038415
Publication date
Feb 6, 2014
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER FILM FORMING COMPOSITION, AND METHOD FOR FORMING...
Publication number
20130230809
Publication date
Sep 5, 2013
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
COMPOSITION FOR FORMING RESIST OVERLAYER FILM FOR EUV LITHOGRAPHY
Publication number
20130209940
Publication date
Aug 15, 2013
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
COMPOSITION FOR FORMATION OF RESIST UNDERLAYER FILM
Publication number
20120251955
Publication date
Oct 4, 2012
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM FOR EUV LITHOGRAPHY
Publication number
20120040291
Publication date
Feb 16, 2012
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM WITH REDUCED OUTGASSING
Publication number
20110230058
Publication date
Sep 22, 2011
Nissan Chemical Industries, Ltd.
Rikimaru Sakamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COATING COMPOSITION AND PATTERN FORMING METHOD
Publication number
20110117746
Publication date
May 19, 2011
Nissan Chemical Industries, Ltd.
Daisuke Maruyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...