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Banqiu Wu
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Megasonic clean with cavity property monitoring
Patent number
12,128,456
Issue date
Oct 29, 2024
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Baking chamber with shroud for mask clean
Patent number
12,085,849
Issue date
Sep 10, 2024
Applied Materials, Inc.
Banqiu Wu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Atomic oxygen and ozone cleaning device having a temperature contro...
Patent number
11,964,068
Issue date
Apr 23, 2024
Applied Materials, Inc.
Banqiu Wu
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Atomic oxygen and ozone device for cleaning and surface treatment
Patent number
11,908,679
Issue date
Feb 20, 2024
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for photomask processing
Patent number
11,803,118
Issue date
Oct 31, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Ultraviolet and ozone clean system
Patent number
11,798,799
Issue date
Oct 24, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Megasonic clean with cavity property monitoring
Patent number
11,654,460
Issue date
May 23, 2023
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Multi-volume baking chamber for mask clean
Patent number
11,644,748
Issue date
May 9, 2023
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pellicle adhesive residue removal system and methods
Patent number
11,467,508
Issue date
Oct 11, 2022
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Intelligent processing tools
Patent number
11,209,804
Issue date
Dec 28, 2021
Applied Materials, Inc.
Banqiu Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for removing photoresist from photomask substrate
Patent number
11,114,350
Issue date
Sep 7, 2021
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Portion of layer removal at substrate edge
Patent number
11,054,746
Issue date
Jul 6, 2021
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for high throughput photomask curing
Patent number
10,962,889
Issue date
Mar 30, 2021
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask pellicle glue residue removal
Patent number
10,933,624
Issue date
Mar 2, 2021
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Attachment feature removal from photomask in extreme ultraviolet li...
Patent number
10,928,724
Issue date
Feb 23, 2021
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photomask laser etch
Patent number
10,802,392
Issue date
Oct 13, 2020
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask pellicle glue residue removal
Patent number
10,710,358
Issue date
Jul 14, 2020
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for the continuous processing of substrates
Patent number
10,236,198
Issue date
Mar 19, 2019
Applied Materials, Inc.
Banqiu Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for in-situ chamber clean in plasma etching processing chamber
Patent number
10,115,572
Issue date
Oct 30, 2018
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for controlling photoresist line width roughn...
Patent number
9,911,582
Issue date
Mar 6, 2018
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrodes for etch
Patent number
9,754,765
Issue date
Sep 5, 2017
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Continuous substrate processing system
Patent number
9,748,125
Issue date
Aug 29, 2017
Applied Materials, Inc.
Banqiu Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cooling method for a 3D IC computer system
Patent number
9,480,187
Issue date
Oct 25, 2016
Banqiu Wu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
3D IC computer system
Patent number
9,439,330
Issue date
Sep 6, 2016
Banqiu Wu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Cost-effective cooling method for computer system
Patent number
9,439,331
Issue date
Sep 6, 2016
Banqiu Wu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods for reducing line width roughness and/or critical dimension...
Patent number
9,280,051
Issue date
Mar 8, 2016
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and methods for fabricating a photomask substrate for EUV...
Patent number
9,250,514
Issue date
Feb 2, 2016
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist treatment method by low bombardment plasma
Patent number
9,177,824
Issue date
Nov 3, 2015
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for controlling photoresist line width roughness
Patent number
9,039,910
Issue date
May 26, 2015
Applied Materials, Inc.
Banqiu Wu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Atmospheric Pressure Plasma for Substrate Annealing
Publication number
20240339324
Publication date
Oct 10, 2024
Applied Materials, Inc.
Banqiu WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC OXYGEN AND OZONE CLEANING DEVICE HAVING A TEMPERATURE CONTRO...
Publication number
20240226358
Publication date
Jul 11, 2024
Applied Materials, Inc.
Banqiu WU
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Photomask handling assembly for atmospheric pressure plasma chamber
Publication number
20240201580
Publication date
Jun 20, 2024
Nolan Layne ZIMMERMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ULTRAVIOLET AND OZONE CLEANING APPARATUS AND METHOD OF USING
Publication number
20240157411
Publication date
May 16, 2024
Banqiu WU
B08 - CLEANING
Information
Patent Application
METHODS AND APPARATUS FOR RUTHENIUM OXIDE REDUCTION ON EXTREME ULTR...
Publication number
20240118603
Publication date
Apr 11, 2024
APPLIED MATERALS, INC.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20240027894
Publication date
Jan 25, 2024
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
ULTRAVIOLET AND OZONE CLEAN SYSTEM
Publication number
20240014028
Publication date
Jan 11, 2024
Banqiu WU
B08 - CLEANING
Information
Patent Application
MEGASONIC CLEAN WITH CAVITY PROPERTY MONITORING
Publication number
20230241649
Publication date
Aug 3, 2023
Banqiu WU
B08 - CLEANING
Information
Patent Application
MEGASONIC CLEAN WITH CAVITY PROPERTY MONITORING
Publication number
20230127302
Publication date
Apr 27, 2023
Banqiu WU
B08 - CLEANING
Information
Patent Application
ULTRAVIOLET AND OZONE CLEAN SYSTEM
Publication number
20230044618
Publication date
Feb 9, 2023
Banqiu WU
B08 - CLEANING
Information
Patent Application
BAKING CHAMBER WITH SHROUD FOR MASK CLEAN
Publication number
20220326608
Publication date
Oct 13, 2022
Banqiu WU
B08 - CLEANING
Information
Patent Application
METHODS AND APPARATUS FOR PHOTOMASK PROCESSING
Publication number
20220326607
Publication date
Oct 13, 2022
Banqiu WU
B08 - CLEANING
Information
Patent Application
MULTI-VOLUME BAKING CHAMBER FOR MASK CLEAN
Publication number
20220326606
Publication date
Oct 13, 2022
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SINGLE-VOLUME BAKING CHAMBER FOR MASK CLEAN
Publication number
20220326605
Publication date
Oct 13, 2022
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ATOMIC OXYGEN AND OZONE CLEANING DEVICE HAVING A TEMPERATURE CONTRO...
Publication number
20220288259
Publication date
Sep 15, 2022
Applied Materials, Inc.
Banqiu WU
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
INTELLIGENT PROCESSING TOOLS
Publication number
20220083034
Publication date
Mar 17, 2022
Applied Materials, Inc.
Banqiu Wu
G05 - CONTROLLING REGULATING
Information
Patent Application
ADHESIVE MATERIAL REMOVAL FROM PHOTOMASK IN ULTRAVIOLET LITHOGRAPHY...
Publication number
20210185793
Publication date
Jun 17, 2021
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR REMOVING PHOTORESIST FROM PHOTOMASK SUBSTRATE
Publication number
20200328128
Publication date
Oct 15, 2020
Applied Materials, Inc.
Banqiu WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASK PELLICLE GLUE RESIDUE REMOVAL
Publication number
20200290339
Publication date
Sep 17, 2020
Applied Materials, Inc.
Banqiu WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATTACHMENT FEATURE REMOVAL FROM PHOTOMASK IN EXTREME ULTRAVIOLET LI...
Publication number
20200183268
Publication date
Jun 11, 2020
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR HIGH THROUGHPUT PHOTOMASK CURING
Publication number
20200166834
Publication date
May 28, 2020
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PORTION OF LAYER REMOVAL AT SUBSTRATE EDGE
Publication number
20200096860
Publication date
Mar 26, 2020
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ATOMIC OXYGEN AND OZONE DEVICE FOR CLEANING AND SURFACE TREATMENT
Publication number
20200098556
Publication date
Mar 26, 2020
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
PHOTOMASK LASER ETCH
Publication number
20200057362
Publication date
Feb 20, 2020
Applied Materials, Inc.
Banqiu WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE ADHESIVE RESIDUE REMOVAL SYSTEM AND METHODS
Publication number
20200033740
Publication date
Jan 30, 2020
Applied Materials, Inc.
Banqiu WU
B08 - CLEANING
Information
Patent Application
PHOTOMASK PELLICLE GLUE RESIDUE REMOVAL
Publication number
20200009854
Publication date
Jan 9, 2020
Applied Materials, Inc.
Banqiu WU
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
SURFACE TREATMENT FOR IMPROVEMENT OF PARTICLE PERFORMANCE
Publication number
20180040457
Publication date
Feb 8, 2018
Applied Materials, Inc.
Banqiu WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Novel hands-free breast pumping system
Publication number
20180001001
Publication date
Jan 4, 2018
Mengju Wu
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Continuous Substrate Processing System
Publication number
20170365491
Publication date
Dec 21, 2017
Applied Materials, Inc.
Banqiu Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR IN-SITU CHAMBER CLEAN IN PLASMA ETCHING PROCESSING CHAMBER
Publication number
20170213709
Publication date
Jul 27, 2017
Applied Materials, Inc.
Banqiu WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...