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Bao R. Yang
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I-Lan, TW
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last 30 patents
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Patent Grant
Uniformity improvement of high aspect ratio contact by stop layer
Patent number
6,227,211
Issue date
May 8, 2001
Taiwan Semiconductor Manufacturing Company
Bao Ru Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for polymer removal after etching
Patent number
5,904,570
Issue date
May 18, 1999
Taiwan Semiconductor Manufacturing Company, Ltd.
Sen-Fu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate isolation process to minimize junction leakage
Patent number
5,763,316
Issue date
Jun 9, 1998
Taiwan Semiconductor Manufacturing Company, Ltd.
Sen-Fu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of monitoring and controlling a silicon nitride etch step
Patent number
5,639,342
Issue date
Jun 17, 1997
Taiwan Semiconductor Manufacturing Company Ltd.
Sen Fu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming damage free patterned layers adjoining the edges...
Patent number
5,633,210
Issue date
May 27, 1997
Taiwan Semiconductor Manufacturing Company, Ltd.
Bao R. Yang
H01 - BASIC ELECTRIC ELEMENTS