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Patents Grants
last 30 patents
Information
Patent Grant
Loading apparatus and physical vapor deposition apparatus
Patent number
11,315,768
Issue date
Apr 26, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xuewei Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating device and heating chamber
Patent number
10,937,672
Issue date
Mar 2, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jun Zhang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
Publication number
20200144035
Publication date
May 7, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xuewei WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
Publication number
20180247799
Publication date
Aug 30, 2018
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jun ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING DEVICE AND HEATING CHAMBER
Publication number
20170365493
Publication date
Dec 21, 2017
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jun ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...