Baoxi Yang

Follow

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography pupil shaping optical system and method for generating...
- Patent number 9,323,052
- Issue date Apr 26, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Grant
Device and method for detecting optical performance of beam shaping...
- Patent number 9,121,788
- Issue date Sep 1, 2015
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Jing Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...
- Publication number 20160004074
- Publication date Jan 7, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING...
- Publication number 20140132952
- Publication date May 15, 2014
- SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCE
- Jing Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR