BARBARA L. SHIFFLER

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HINESBURG, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
In situ monitoring of wafer charge distribution in plasma processing
- Patent number 7,864,502
- Issue date Jan 4, 2011
- International Business Machines Corporation
- Kevin M Boyd
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN SITU MONITORING OF WAFER CHARGE DISTRIBUTION IN PLASMA PROCESSING
- Publication number 20080285202
- Publication date Nov 20, 2008
- International Business Machines Corporation
- KEVIN M. BOYD
- H01 - BASIC ELECTRIC ELEMENTS