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Barbara Schmidt
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for controlling a process for fabricating integrated devices
Patent number
7,815,812
Issue date
Oct 19, 2010
Applied Materials, Inc.
Matthew F. Davis
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for monitoring trench profiles and for spectro...
Patent number
7,372,579
Issue date
May 13, 2008
Infineon Technologies, AG
Zhen-Long Chen
G01 - MEASURING TESTING
Information
Patent Grant
Method for production of a semiconductor structure
Patent number
7,141,507
Issue date
Nov 28, 2006
Infineon Technologies AG
Oliver Genz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching a layer in a trench and method of fabricating a t...
Patent number
6,939,805
Issue date
Sep 6, 2005
Infineon Technologies AG
Jörn Lützen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for monitoring trench profiles and for spectro...
Publication number
20070247634
Publication date
Oct 25, 2007
Zhen-Long Chen
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR CONTROLLING A PROCESS FOR FABRICATING INTEGRATED DEVICES
Publication number
20070017896
Publication date
Jan 25, 2007
Applied Materials, Inc.
Matthew F. Davis
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for production of a semiconductor structure
Publication number
20050196952
Publication date
Sep 8, 2005
Infineon Technologies AG
Oliver Genz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for controlling a process for fabricating integrated devices
Publication number
20040200574
Publication date
Oct 14, 2004
APPLIED MATERIALS, INC.
Matthew F. Davis
G05 - CONTROLLING REGULATING
Information
Patent Application
Method of etching a layer in a trench and method of fabricating a t...
Publication number
20030064591
Publication date
Apr 3, 2003
Jorn Lutzen
H01 - BASIC ELECTRIC ELEMENTS