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Barbel Trossbach
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Aalen, DE
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last 30 patents
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Patent Grant
Imaging device in a projection exposure machine
Patent number
7,710,542
Issue date
May 4, 2010
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
Publication number
20110199597
Publication date
Aug 18, 2011
Carl Zeiss SMT GMBH
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
Publication number
20090040487
Publication date
Feb 12, 2009
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
Publication number
20080174757
Publication date
Jul 24, 2008
Carl Zeiss SMT AG
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Imaging device in a projection exposure facility
Publication number
20040263812
Publication date
Dec 30, 2004
Wolfgang Hummel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY