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Barend J. T. Ravenhorst
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Almere, NL
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last 30 patents
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Patent Grant
Wafer processing apparatus with heated, rotating substrate support
Patent number
9,018,567
Issue date
Apr 28, 2015
ASM International N.V.
Chris G. M. de Ridder
F27 - FURNACES KILNS OVENS RETORTS
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last 30 patents
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Patent Application
WAFER PROCESSING APPARATUS WITH HEATED, ROTATING SUBSTRATE SUPPORT
Publication number
20130017503
Publication date
Jan 17, 2013
Chris G.M. De Ridder
H01 - BASIC ELECTRIC ELEMENTS