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Waalre, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus
Patent number
11,762,304
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Güneş Nakiboğlu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and lithographic projection method
Patent number
10,459,354
Issue date
Oct 29, 2019
ASML Netherlands B.V.
Kevin Van De Ruit
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
Patent number
10,444,632
Issue date
Oct 15, 2019
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus operable to perform a measurement operation on a substrat...
Patent number
9,989,858
Issue date
Jun 5, 2018
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,081,311
Issue date
Jul 14, 2015
ASML Netherlands B.V.
Herman Vogel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, an illumination system, a projection system...
Patent number
8,810,769
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Jeroen Gerard Gosen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
Patent number
7,963,144
Issue date
Jun 21, 2011
ASML Netherlands B.V.
Norbertus Benedictus Koster
G01 - MEASURING TESTING
Information
Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
Patent number
7,624,617
Issue date
Dec 1, 2009
ASML Netherlands B.V.
Norbertus Benedictus Koster
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
Publication number
20180364582
Publication date
Dec 20, 2018
ASML, Netherlands B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20180299796
Publication date
Oct 18, 2018
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND LITHOGRAPHIC PROJECTION METHOD
Publication number
20180095369
Publication date
Apr 5, 2018
ASML NETHERLANDS B.V.
Kevin VAN DE RUIT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS OPERABLE TO PERFORM A MEASUREMENT OPERATION ON A SUBSTRAT...
Publication number
20160334713
Publication date
Nov 17, 2016
ASML Netherlands B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120249983
Publication date
Oct 4, 2012
ASML NETHERLANDS B.V.
Herman Vogel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, AN ILLUMINATION SYSTEM, A PROJECTION SYSTEM...
Publication number
20110228239
Publication date
Sep 22, 2011
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas Analyzing System, Lithographic Apparatus and Method of Improvin...
Publication number
20100005854
Publication date
Jan 14, 2010
ASML NETHERLANDS B.V.
Norbertus Benedictus Koster
G01 - MEASURING TESTING
Information
Patent Application
Gas analyzing system, lithographic apparatus and method of improvin...
Publication number
20080128636
Publication date
Jun 5, 2008
ASML NETHERLANDS B.V.
Norbertus Benedictus Koster
G01 - MEASURING TESTING