Bart J. Van Zeghbroech

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Richterswil, CH

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Patents Grantslast 30 patents

Information Patent Grant
Process for forming sub-micrometer patterns using silylation of res...
- Patent number 4,803,181
- Issue date Feb 7, 1989
- International Business Machines Corporation
- Peter L. Buchmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY