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Bart Luc Swinnen
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Holsbeek, BE
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last 30 patents
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Patent Grant
Lithographic apparatus, method of determining a model parameter, de...
Patent number
7,565,219
Issue date
Jul 21, 2009
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of determining a model parameter, de...
Patent number
7,558,643
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment strategy optimization method
Patent number
7,042,552
Issue date
May 9, 2006
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
ALIGNMENT STRATEGY OPTIMIZATION METHOD
Publication number
20060103822
Publication date
May 18, 2006
ASML NETHERLANDS B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of determining a model parameter, de...
Publication number
20050147902
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of determining a model parameter, de...
Publication number
20050123843
Publication date
Jun 9, 2005
ASML NETHERLANDS B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY