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last 30 patents
Information
Patent Grant
Tuning patterning apparatus based on optical characteristic
Patent number
11,474,436
Issue date
Oct 18, 2022
ASML Netherlands B.V.
Bart Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,996,567
Issue date
May 4, 2021
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of manufacturing a lithographic...
Patent number
10,324,384
Issue date
Jun 18, 2019
ASML Netherlands B.V.
Gerben Pieterse
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
TUNING PATTERNING APPARATUS BASED ON OPTICAL CHARACTERISTIC
Publication number
20210247698
Publication date
Aug 12, 2021
ASML NETHERLANDS B.V.
Bart SMEETS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20200117093
Publication date
Apr 16, 2020
ASML NETHERLANDS B.V.
Johannes Jacobus Matheus BASELMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...
Publication number
20180210350
Publication date
Jul 26, 2018
ASML NETHERLANDS B.V.
Gerben PIETERSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY