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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic method and apparatus
Patent number
10,175,586
Issue date
Jan 8, 2019
ASML Netherlands B.V.
Jaqueline Borges Nicolau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,139,735
Issue date
Nov 27, 2018
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus and device manufacturing method
Patent number
10,001,712
Issue date
Jun 19, 2018
ASML Netherlands B.V.
Theodorus Wilhelmus Polet
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method and apparatus
Patent number
9,817,320
Issue date
Nov 14, 2017
ASML Netherlands B.V.
Jaqueline Borges Nicolau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic Method and Apparatus
Publication number
20180039180
Publication date
Feb 8, 2018
ASML NETHERLANDS B.V.
Jaqueline BORGES NICOLAU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170219939
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Theodorus Wilhelmus POLET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20170131642
Publication date
May 11, 2017
ASML NETHERLANDS B.V.
Johannes Jacobus Matheus BASELMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Method and Apparatus
Publication number
20160274462
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Jaqueline BORGES NICOLAU
G06 - COMPUTING CALCULATING COUNTING