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Bartholomaeus Szafranek
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Ober-Ramstadt, DE
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last 30 patents
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Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR PROCESSING A SURFACE OF...
Publication number
20240118632
Publication date
Apr 11, 2024
Carl Zeiss SMT GMBH
Stefan Friedrich Rohrlack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
METHOD AND APPARATUS FOR MASK REPAIR
Publication number
20230280647
Publication date
Sep 7, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR PROCESSING A LITHOGRAPHIC MASK
Publication number
20230113702
Publication date
Apr 13, 2023
Carl Zeiss SMT GMBH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS