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Bas M Mertens
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Den Haag, NL
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Patents Grants
last 30 patents
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Patent Grant
Device, EUV lithographic device and method for preventing and clean...
Patent number
7,462,842
Issue date
Dec 9, 2008
Carl Zeiss SMT AG
Marco E. Wedowski
B08 - CLEANING
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Patent Grant
Device, EUV-lithographic device and method for preventing and clean...
Patent number
7,060,993
Issue date
Jun 13, 2006
Carl Zeiss SMT AG
Marco E. Wedowski
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Method for preventing contamination and lithographic device
Publication number
20070054497
Publication date
Mar 8, 2007
Markus Weiss
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Device, EUV lithographic device and method for preventing and clean...
Publication number
20060192158
Publication date
Aug 31, 2006
Marco E. Wedowski
B08 - CLEANING