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Bastiaan Matthias Mertens
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Den Haag, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic clamp
Patent number
9,939,737
Issue date
Apr 10, 2018
ASML Netherlands B.V.
Petrus Augustinus Franciscus Klomp
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic device, device manufacturing method and device manufac...
Patent number
7,684,012
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, system and device manufacturing method
Patent number
7,491,951
Issue date
Feb 17, 2009
ASML Netherlands B.V.
Marc Hubertus Lorenz Van Der Velden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,279,690
Issue date
Oct 9, 2007
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and patterning device transport
Patent number
7,248,340
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and patterning device transport
Patent number
7,151,589
Issue date
Dec 19, 2006
ASML Netherlands B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
7,115,886
Issue date
Oct 3, 2006
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for cleaning a surface of a component of a lithographic proj...
Patent number
7,116,394
Issue date
Oct 3, 2006
ASML Netherlands B.V.
Levinus Pieter Bakker
B08 - CLEANING
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, and...
Patent number
6,862,075
Issue date
Mar 1, 2005
ASML Netherlands B.V.
Norbertus Benedictus Koster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method and...
Patent number
6,828,569
Issue date
Dec 7, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, dev...
Patent number
6,724,460
Issue date
Apr 20, 2004
ASML Netherlands B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing method, and...
Patent number
6,614,505
Issue date
Sep 2, 2003
ASML Netherlands B.V.
Norbertus Benedictus Koster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Electrostatic Clamp
Publication number
20150370178
Publication date
Dec 24, 2015
ASML NETHERLANDS B.V.
Petrus Augustinus Franciscus KLOMP
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Lithographic apparatus, system and device manufacturing method
Publication number
20070146660
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Marc Hubertus Lorenz Van Der Velden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20070085984
Publication date
Apr 19, 2007
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic device, device manufacturing method and device manufac...
Publication number
20060268246
Publication date
Nov 30, 2006
ASML NETHERLANDS B.V.
Johannes Henricus Wilhelmus Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060219950
Publication date
Oct 5, 2006
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus and patterning device transport
Publication number
20050286029
Publication date
Dec 29, 2005
ASML NETHERLANDS B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and patterning device transport
Publication number
20050286041
Publication date
Dec 29, 2005
ASML NETHERLANDS B.V.
Erik Leonardus Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20050112508
Publication date
May 26, 2005
ASML NETHERLANDS B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and device for measuring contamination of a surface of a com...
Publication number
20040227102
Publication date
Nov 18, 2004
ASML NETHERLANDS B.V.
Ralph Kurt
G01 - MEASURING TESTING
Information
Patent Application
Method for cleaning a surface of a component of a lithographic proj...
Publication number
20040218157
Publication date
Nov 4, 2004
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
B08 - CLEANING
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, and...
Publication number
20040032574
Publication date
Feb 19, 2004
ASML NETHERLANDS B.V.
Norbertus Benedictus Koster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method and...
Publication number
20030096193
Publication date
May 22, 2003
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, dev...
Publication number
20030095240
Publication date
May 22, 2003
ASM LITHOGRAPHY B.V.
Willem Van Schaik
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing method, and...
Publication number
20020154279
Publication date
Oct 24, 2002
ASML NETHERLANDS B.V.
Norbertus Benedictus Koster
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY